Inventor · Greenwich, NY, US

Scott Beasor

33Patents
5h-index
61Co-inventors
64Inventor score

Filing activity: May 20, 2013 → Jan 30, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9812453B1 Self-aligned sacrificial epitaxial capping for trench silicide Electricity 17 Active
US10373877B1 Methods of forming source/drain contact structures on integrated circuit products Electricity 8 Active
US9397004B2 Methods for fabricating FinFET integrated circuits with simultaneous formation of local contact openings Electricity 8 Active
US10326002B1 Self-aligned gate contact and cross-coupling contact formation Electricity 6 Active
US9330971B2 Method for fabricating integrated circuits including contacts for metal resistors Electricity 6 Active
US9419082B2 Source/drain profile engineering for enhanced p-MOSFET Electricity 4 Active
US10049944B2 Method of manufacturing selective nanostructures into finFET process flow Electricity 3 Active
US10586736B2 Hybrid fin cut with improved fin profiles Electricity 3 Active
US9984933B1 Silicon liner for STI CMP stop in FinFET Electricity 3 Active
US10043708B2 Structure and method for capping cobalt contacts Electricity 2 Active
US10879180B2 FinFET with etch-selective spacer and self-aligned contact capping layer Electricity 2 Active
US10361289B1 Gate oxide formation through hybrid methods of thermal and deposition processes and method for producing the same Electricity 1 Active
US10403742B2 Field-effect transistors with fins formed by a damascene-like process Electricity 1 Active
US10629739B2 Methods of forming spacers adjacent gate structures of a transistor device Electricity 1 Active
US10832966B2 Methods and structures for a gate cut Electricity 1 Active
US10475890B2 Scaled memory structures or other logic devices with middle of the line cuts Electricity 1 Active
US10580701B1 Methods of making a self-aligned gate contact structure and source/drain metallization structures on integrated circuit products Electricity 1 Active
US10707175B2 Asymmetric overlay mark for overlay measurement Electricity 1 Active
US10818659B2 FinFET having upper spacers adjacent gate and source/drain contacts Electricity 1 Active
US10872979B2 Spacer structures for a transistor device Electricity 1 Active
US10832965B2 Fin reveal forming STI regions having convex shape between fins Electricity 1 Active
US10763176B2 Transistor with a gate structure comprising a tapered upper surface Electricity 0 Active
US10804379B2 FinFET device and method of manufacturing Electricity 0 Active
US10636890B2 Chamfered replacement gate structures Electricity 0 Active
US10797049B2 FinFET structure with dielectric bar containing gate to reduce effective capacitance, and method of forming same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.