Inventor · Hwaseong-si, KR

Eun-Ae Chung

23Patents
6h-index
55Co-inventors
68Inventor score

Filing activity: May 9, 2001 → Jun 29, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6815221B2 Method for manufacturing capacitor of semiconductor memory device controlling thermal budget Electricity 13 Expired
US9564435B2 Semiconductor device including FinFETs having different gate structures and method of manufacturing the semiconductor device Electricity 11 Active
US9368589B2 Semiconductor device and semiconductor module Electricity 8 Active
US7655519B2 Methods of fabricating metal-insulator-metal capacitors with a chemical barrier layer in a lower electrode Electricity 8 Expired
US7514315B2 Methods of forming capacitor structures having aluminum oxide diffusion barriers Electricity 6 Active
US7312130B2 Methods of forming capacitor structures including L-shaped cavities Electricity 6 Expired
US7759718B2 Method manufacturing capacitor dielectric Electricity 5 Active
US6858529B2 Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus Electricity 4 Expired
US7153750B2 Methods of forming capacitors of semiconductor devices including silicon-germanium and metallic electrodes Electricity 3 Expired
US7838438B2 Dielectric layer, method of manufacturing the dielectric layer and method of manufacturing capacitor using the same Electricity 3 Active
US7791125B2 Semiconductor devices having dielectric layers and methods of forming the same Electricity 3 Active
US8119486B2 Methods of manufacturing semiconductor devices having a recessed-channel Electricity 2 Active
US7750385B2 Semiconductor interconnection structures and capacitors including poly-SiGe layers and metal contact plugs Electricity 2 Active
US6472319B2 Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment Electricity 1 Expired
US6683001B2 Method for manufacturing a semiconductor device whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed Electricity 1 Expired
US9443735B2 Method of manufacturing semiconductor device Electricity 1 Active
US7176533B2 Semiconductor devices having contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus Electricity 1 Expired
US8110473B2 Semiconductor device comprising multilayer dielectric film and related method Electricity 1 Active
US7485585B2 Method of forming a thin film, method of manufacturing a gate structure using the same and method of manufacturing a capacitor using the same Electricity 1 Active
US6927166B2 Method for manufacturing semiconductor devices and integrated circuit capacitors whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed Electricity 1 Expired
US7939872B2 Multi-dielectric films for semiconductor devices and methods of fabricating multi-dielectric films Electricity 1 Active
US6953741B2 Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process Electricity 0 Expired
US7824501B2 In-situ method of cleaning vaporizer during dielectric layer deposition process Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.